Melexis MLX90830 Triphibian™ MEMS Pressure Sensor
The first of its kind
Based on Triphibian™ technology, the MLX90830 by Melexis is a miniaturized MEMS pressure sensor handling absolute measurement of gas and liquid media from 2 to 70 bar in a robust way. Factory calibrated and analog output.
The MLX90830 is the first product to feature the new patented Triphibian™ technology. This miniaturized MEMS pressure sensor handles measurement of gas and liquid media from 2 to 70 bar effectively.
Core to the MLX90830 is the Melexis’ ground-breaking Triphibian™ technology, which not only allows the MEMS (Micro Electro-Mechanical System) sensor to provide accurate measurements considerably above 5 bar, but also while in contact with liquid. This innovative combination of high pressure sensing while compatible with gas and liquid is achieved by the unique construction of the Melexis MLX90830. The sensing mechanism contains a suspended cantilever inside of an SO16 package with the diaphragm at its tip.
The suspended cantilever design of the sensor provides pressure spike immunity up to 2000 bar/msec and static burst level up to 210 bar. While the two available calibrated ranges (10 or 35 bar) are each tailored to fulfill the demands of a distinct EV thermal management system, including low/high pressure refrigeration loops. The MLX90830’s design is inherently more robust than rear-side exposed solutions, which still experience a pressure differential between the glass pedestal side and the wire bonding side. The pressure equalization principle is also valid for frozen media, allowing the MLX90830 to survive in such conditions, a first for MEMS pressure sensors.
The MLX90830 includes a sensor readout circuit, digital hardware, voltage regulators and analog output drivers. Piezo-resistive elements implanted into the membrane create a Wheatstone bridge to generate an output signal. This signal is amplified and converted into a digital format, allowing the 16-bit Digital Signal Processing (DSP) to apply temperature compensation before the result is provided as an analog output.
The sensor is equipped with advanced protective mechanisms against both overvoltage (above +40 V) and reverse voltage (below -40 V). This makes it usable for truck applications. The MLX90830 has been developed as a Safety Element out of Context (SEooC) in accordance with ISO 26262, enabling up to ASIL B system integration ensuring it meets the latest EV safety demands.
The Melexis MLX90830 is factory calibrated or fully programmable through the connector with the PTC-04 (PTC-04 DB-HALL06) for customized calibration curves. Contact your local representative for more information.
Features and Benefits
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Applications
- Absolute pressures from 2bar to 70bar with gas and/or liquid media
- Thermal Management of Electric Vehicles
- Standalone sensors
- Embedded sensors in expansion valves
- Embedded sensors in e-compressors
- Embedded sensors in pumps
- HVAC-R systems
