6in1 Sensor
EWTS5G series
The 6in1 sensor is a 6DoF inertial sensor with functional safety standard ISO26262 compliance for automotive applications. The sensing elements consists 3 Accelerometers and 3 Gyroscopes in single MEMS chip.
The MEMS, ASIC and Cap are directly bonded at wafer level and packaged. This enables the 6in1 sensor to be compact, highly accurate, easy to install, and highly reliable.
Features:
- Function Safety compliance (ISO26262) for automotive safety system
- Compatible with ASIL-D functional safety development
- 6DoF sensors on one single MEMS die with high accurate and for more system design flexibility
- Orthogonality : ≦0.01° between Gyro and Acceleration axis
- Contribute for compact and simple ECU system design
- 6DoF one package ：4.5 x 4.5 x 1.1 mm
- RoHS compliance
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